By Gordon S. Kino, Timothy R. Corle
This booklet offers a entire advent to the sphere of scanning optical microscopy for scientists and engineers. The e-book concentrates generally on tools: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A finished dialogue of the idea and layout of the Near-Field Scanning Optical Microscope (NSOM) can also be given. The textual content discusses the sensible points of establishing a confocal scanning optical microscope or optical interference microscope, and the purposes of those microscopes to part imaging, organic imaging, and semiconductor inspection and metrology.A finished theoretical dialogue of the intensity and transverse answer is given with emphasis put on the sensible result of the theoretical calculations and the way those can be utilized to aid comprehend the operation of those microscopes. Key positive aspects * presents a complete creation to the sector of scanning optical microscopy for scientists and engineers * Explains many functional functions of scanning optical and interference microscopy in such various fields as biology and semiconductor metrology * Discusses in theoretical phrases the beginning of the enhanced intensity and transverse solution of scanning optical and interference microscopes with emphasis at the sensible result of the theoretical calculations * Considers the sensible features of establishing a confocal scanning or interference microscope and explores many of the layout tradeoffs made for microscopes utilized in quite a few functions * Discusses the speculation and layout of near-field optical microscopes * Explains section imaging within the scanning optical and interference microscopes
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At K L A Instruments. A simplified schematic of the Linnik microscope is shown in Fig. 29. 37,38 In this microscope, a spatially and temporally incoherent light source such as a filament or xenon arc lamp is split into two beams by a beamsplitter near the objective. Part of the light passes through an objective lens to the sample, while the remainder passes through an identical lens to the reference mirror. Light reflected from the object and the reference mirror travels back through the objectives, beamsplitter and interferes at a CCD detector array.
C l o u d P l o t s The shallow depth response of the CSOM can be used to construct cross-sectional images optically, without physically cutting the sample. Due to their appearance, these optical cross sections are called cloud plots. To produce a cloud plot, the sample is scanned axially in the focus direction and the intensity variation at each pixel of a selected linescan is recorded. The resulting images record the intensity in the x - z plane. 0/xm tall I-line (365 nm exposure wavelength) photoresist on silicon.
This image was made on the same overlay structure as shown in Fig. 15. DIC imaging on both the standard and confocal scanning microscope will also be discussed in Chapter 4. We will now turn our attention to the main subject of this book, the confocal scanning optical microscope. 1. One variation of the CSOM called the confocal scanning laser microscope (CSLM) is illustrated in Fig. 21. In this instrument, a collimated beam 32 An example of a DIC image of a box-in-box overlay structure. from a laser is focused onto a pinhole which acts as a spatial filter.
Confocal scanning optical microscopy and related imaging systems by Gordon S. Kino, Timothy R. Corle